Abrading – Machine – Rotary tool
Patent
1998-02-02
2000-03-21
Hail, III, Joseph J.
Abrading
Machine
Rotary tool
B24B 500
Patent
active
060396385
ABSTRACT:
A method and apparatus for planarizing works can adjust an urging force or pressure applied to a work with ease in a short period of time, but also avoid wasteful use of rings. Wafers 100 adhered to a block 110 is made into contact with a lower surface plate 1. An annular ring 5 which encloses the wafers 100 is disposed in the peripheral portion of the block 110. The peripheral portion of the block 110 is pressed by a head 4 through an annular ring 5. Simultaneous with this, by rotating the lower surface plate 1 while pressing the central portion of the block 110 at a desired pressure by means of a center-pressing member 6 provided on the head 4, the wafers 100 are planarized. Preferably, the center-pressing member 6 includes a pressure chamber 7 formed in the central portion of the head 4, a pressing plate 8 mounted in an opening of the pressure chamber 7 for movement relative thereto so that it can project from the opening to thereby press the central portion of the block 110, and an air pump 9 for controlling the air pressure in the pressure chamber 7.
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Nagayama Hitoshi
Nezu Motoi
Cooke Dermott J.
Hail III Joseph J.
Kelly Michael K.
Speedfam Co., Ltd.
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