4. Abrading
  5. Accessory
  6. Tool cleaner

Speedfam Co., Ltd.

Corporate Assignee

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Apparatus for applying an urging force to a wafer

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Patent

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Apparatus for polishing outer periphery of workpiece

Abrading – Machine – Combined
Reexamination Certificate

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Apparatus for polishing periphery of device wafer and...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Apparatus for removing deposited film

Abrading – Machine – Stationary tool
Reexamination Certificate

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Apparatus for washing disc-shaped workpieces

Brushing – scrubbing – and general cleaning – Machines – Brushing
Patent

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Profile ID: LFUS-PAI-P-352503

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