Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Reexamination Certificate
2011-08-02
2011-08-02
Turner, Archene (Department: 1784)
Chemistry: electrical and wave energy
Processes and products
Coating, forming or etching by sputtering
C204S192160, C204S279000, C427S419100
Reexamination Certificate
active
07988832
ABSTRACT:
A work piece or structural component is coated with a system of film layers at least one of which is composed of (AlyCr1-y)X, where X=N, C, B, CN, BN, CBN, NO, CO, BO, CNO, BNO or CBNO and 0.2≦y<0.7, with the composition within said film being either essentially constant or varying over the thickness of the film continually or in steps, as well as a process for producing it.
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Derflinger Volker
Gey Christoph
Reiter Andreas
Oerlikon Trading AG, Trubbach
Pearne & Gordon LLP
Turner Archene
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