Work piece transfer system for an ion beam implanter

Details Work piece transfer system for an ion beam implanter Work piece transfer system for an ion beam implanter

2006-01-17

2006-01-17

Nuygen, Kiet T. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S441110

Reexamination Certificate

active

06987272

ABSTRACT:
A work piece transfer apparatus for use with an ion beam implanter for treating a work piece at sub-atmospheric pressure. The work piece transfer apparatus includes an evacuable load lock system in fluid communication with an interior region the implantation chamber interior region. The load lock system includes a support surface for supporting the work piece with an opening aligned with the work piece. The work piece transfer apparatus further includes a work piece support within the implantation chamber having a pedestal supported by a linkage with two degrees of freedom. The linkage moves the pedestal transversely through the load lock support surface opening to pick up the work piece from the support surface prior to treatment. The pedestal holds the work piece in position in the implantation chamber for treatment. The linkage then moves the pedestal transversely through the load lock support surface opening to deposit the work piece on the support surface subsequent to treatment.

REFERENCES:
patent: 4293137 (1981-10-01), Ezekiel
patent: 4761559 (1988-08-01), Myron
patent: 4975586 (1990-12-01), Ray
patent: 5003183 (1991-03-01), Nogami et al.
patent: 5229615 (1993-07-01), Brune et al.
patent: 5436790 (1995-07-01), Blake et al.
patent: 5444597 (1995-08-01), Blake et al.
patent: 5486080 (1996-01-01), Sieradzki
patent: 5882165 (1999-03-01), Maydan et al.
patent: 6163033 (2000-12-01), Smick et al.
patent: 6207959 (2001-03-01), Satoh et al.
patent: 6350097 (2002-02-01), Mitchell et al.
patent: 6555825 (2003-04-01), Mitchell et al.

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