Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2007-10-16
2007-10-16
Tran, Khoi H. (Department: 3651)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
C700S214000
Reexamination Certificate
active
10485969
ABSTRACT:
There is a jump in the number of devices formed on a single wafer, and it takes a lot of time to inspect a single wafer. In addition, if wafers are inspected every lot, detected wafers remain in staying in a prober until the inspection of all of the wafers is completed. Therefore, the time required to transfer the wafers of each lot to the subsequent step is delayed. As a result, it is difficult to shorten TAT (Turn-Around-Time), and it is difficult to flexibly operate the prober.A transfer system E according to the present invention includes: a host computer1; a plurality of probers2under the control of the host computer1; a plurality of RGVs4for delivering a wafer W to each of the probers2, one by one, at its request; and a transfer operating unit5, associated with the host computer, for operating the RGVs4. The transfer operating unit5has a scheduler54A and a dispatcher54B, for preparing an operating schedule for each of the RGVs4on the basis of the relationship in position between each of the probers2and each of the RGVs4, and for determining optimum transfer paths for the RGVs4, to assign a corresponding one of the RGVs4to a corresponding one of the optimum transfer paths.
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Akiyama Shuji
Hosaka Hiroki
Iijima Toshihiko
Nakao Takashi
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
Tran Khoi H.
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