Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2005-10-04
2009-11-24
Everhart, Caridad M (Department: 2895)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S584000, C257S098000, C257SE33044, C257SE21580
Reexamination Certificate
active
07622385
ABSTRACT:
A wiring pattern forming method which is a method of forming a wiring pattern by using a liquid droplet ejection method on a preset area on a substrate, includes:forming a bank on the preset area on the substrate;ejecting a functional liquid including a wiring pattern material on an area surrounded by the bank and drying the functional liquid to form the wiring pattern; andremoving part of the bank so as to make a height of the bank and a thickness of the wiring pattern approximately the same.
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Hirai Toshimitsu
Moriya Katsuyuki
Everhart Caridad M
Oliff & Berridg,e PLC
Seiko Epson Corporation
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