Thermal measuring and testing – Thermal calibration system
Patent
1992-08-11
1993-11-30
Yasich, Daniel M.
Thermal measuring and testing
Thermal calibration system
2502521, 324158R, G01K 1500, G01D 1800
Patent
active
052659577
ABSTRACT:
A device and method for calibrating at least one temperature sensor is disclosed herein. A wafer (30) is provided having a first plurality of calibration islands (36) of a material having a melting point in the range 150.degree.-1150.degree. C. The effective reflectivity of the wafer is measured in operation using the temperature sensor or via a separate light source. A first step change in an output signal of the temperature sensor corresponding to a wafer temperature equal to the melting point of the first calibration islands is detected. Finally, the temperature sensor calibration parameters are calculated.
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Moslehi Mehrdad M.
Najm Habib
Velo Lino A.
Donaldson Richard
Garner Jacqueline J.
Hiller William E.
Texas Instruments Incorporated
Yasich Daniel M.
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