4. Electric resistance heating devices
  5. Heating devices
  6. Radiant heater

Lino A. Velo

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Apparatus and method for determining wafer temperature using pyr

Electric resistance heating devices – Heating devices – Radiant heater
Patent

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Method and apparatus for depositing tantalum-based thin...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method for fabricating a semiconductor chip interconnect

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for forming a copper film on a substrate

Coating processes – Coating by vapor – gas – or smoke – Metal coating
Reexamination Certificate

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Microelectronic interconnect material with adhesion...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Profile ID: LFUS-PAI-P-68871

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