Wire bond and redistribution layer process

Semiconductor device manufacturing: process – Making passive device

Reexamination Certificate

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Details

C438S283000, C438S617000, C257SE21022

Reexamination Certificate

active

07541251

ABSTRACT:
A manufacturing method of a semiconductor device with a copper redistribution line, a copper inductor and aluminum wire bond pads and the integration of the resulting device with an integrated circuit on a single chip, resulting in the decreased size of the chip.

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patent: 7436683 (2008-10-01), Shen
patent: 2007/0275503 (2007-11-01), Lin et al.

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