Window for microwave plasma processing device

Details Window for microwave plasma processing device Window for microwave plasma processing device

1991-05-24

1993-08-10

Hearn, Brian E.

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

With microwave gas energizing means

118723, 333252, C23C 1650, H01L 2100

Patent

active

052345262

ABSTRACT:
A microwave transmitting window for a plasma processing device. The window is a body of one or more pieces of the same or different dielectric materials. A surface of the window facing a microwave transmitting horn or waveguide is planar and extends perpendicularly to an axial direction. An opposite surface of the window is recessed such that the body has a non-uniform thickness between the two surfaces. The recessed surface can have various shapes and the overall size of the window can be equal to the size of a plasma formation chamber of the plasma processing device. The outlet of the plasma formation chamber can be formed in an end wall or the outlet can be formed by the inner periphery of the plasma formation chamber.

REFERENCES:
patent: 4393333 (1983-07-01), Sakudo et al.
patent: 4401054 (1983-08-01), Matsuo et al.
patent: 4409520 (1983-10-01), Koike et al.
patent: 4414488 (1983-11-01), Hoffmann et al.
patent: 4831963 (1989-05-01), Saito et al.
patent: 4857809 (1989-08-01), Torii et al.
patent: 4960073 (1990-10-01), Suzuki et al.
patent: 4987346 (1991-01-01), Katzschner et al.
Webster's II New Riverside University DIctionary, 1988, p. 330.

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