Wide dynamic range capacitive transducer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

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7351418, 73718, 3612834, G01P 15125, G01L 912

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active

061519677

ABSTRACT:
A variable area capacitor with a flexible electrode responsive to a physical effect and a rigid electrode with a predetermined surface contour. The surface contour is dimensioned to provide a specific change in capacitance with deflection of the flexible electrode. A thin dielectric layer maintains a substantially fixed spacing between the two electrodes. Preferred embodiments include a pressure sensor, microphone and accelerometer. A differential transconductance amplifier detects changes of the variable capacitor in a low-impedance, bridge-like circuit and feeds back current to balance the bridge. The voltage that controls the feedback current is proportional to capacitance over a wide dynamic range.

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Basarab-Horwath et al., "Capacitance transducer using a thin dielectric and variable-area electrode", IEE Proc., vol. 127, PT.A, No. 6, Jul. 1980, pp. 392-393.
Carter et al., "Measurement of Displacement and Strain by Capacity Methods", Proc. J. Mech. E. (152) 1945, pp. 215-221.

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