Wet etching of cured polyimide

Details Wet etching of cured polyimide Wet etching of cured polyimide

1988-12-16

1989-08-15

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156655, 1566591, 252 795, B44C 122, B29C 3700, C03C 1500, C03C 2506

Patent

active

048571431

ABSTRACT:
A fully cured or substantially fully cured polyimide is etched by contacting the imide with an aqueous solution of a metal hydroxide such as an alkali metal or alkali earth hydroxide and a metallic compound selected from metal carbonates, sulfates and phosphates. The presence of the carbonate, sulfate or phosphare reduces the undercutting of a resist pattern on the polyimide.

REFERENCES:
patent: 4078102 (1978-03-01), Bendz et al.
patent: 4411735 (1983-10-01), Belani
patent: 4426253 (1984-01-01), Kreuz et al.
patent: 4431478 (1984-02-01), Yamaoka et al.

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