Wet etchable laminated body, insulation film, and electronic...

Details Wet etchable laminated body, insulation film, and electronic... Wet etchable laminated body, insulation film, and electronic...

2006-10-06

2011-11-29

Vinh, Lan (Department: 1713)

Etching a substrate: processes

Forming or treating electrical conductor article

C216S020000, C216S033000, C216S043000, C438S214000, C438S215000, C438S332000, C438S458000, C156S330900, C156S331500

Reexamination Certificate

active

08066891

ABSTRACT:
The present invention provides a laminate comprising an insulating layer having suppressed dusting properties, an insulating film comprising the insulating layer, and an electronic circuit component comprising a pattern of the insulating layer. The laminate has a layer construction of first inorganic material layer-insulating layer-second inorganic material layer or a layer construction of inorganic material layer-insulating layer. The insulating layer comprises a laminate of two or more wet etchable insulating unit layers. At the interface between the inorganic material layer and the insulating layer, surface irregularities of the inorganic material layer have been transferred onto the surface of the insulating layer. The average height of the surface irregularities transferred onto the insulating layer is less than the thickness of the outermost insulating unit layer in the insulating layer.

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