Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate
2005-03-29
2005-03-29
Ashton, Rosemary (Department: 1752)
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Radiation sensitive composition or product or process of making
C430S325000, C430S905000, C430S272100
Reexamination Certificate
active
06872506
ABSTRACT:
Anti-reflective compositions and methods of using these compositions to form circuits are provided. The compositions comprise a polymer dissolved or dispersed in a solvent system. In a preferred embodiment, the polymers include a light-attenuating moiety having a structure selected from the group consisting of:where:each of X1and Y is individually selected from the group consisting of electron withdrawing groups;R2is selected from the group consisting of alkyls and aryls; andR3is selected from the group consisting of hydrogen and alkyls.The resulting compositions are spin bowl compatible (i.e., they do not crosslink prior to the bake stages of the microlithographic processes or during storage at room temperature), are wet developable, and have superior optical properties.
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Machine Assisted English translation for JP-10149531.
Krishnamurthy Vandana
Neef Charles J.
Ashton Rosemary
Brewer Science Inc.
Hovey & Williams, LLP
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