Wet cleaning of electrostatic chucks

Details Wet cleaning of electrostatic chucks Wet cleaning of electrostatic chucks

2006-05-30

2006-05-30

Carrillo, Sharidan (Department: 1746)

Cleaning and liquid contact with solids

Processes

Including application of electrical radiant or wave energy...

C134S026000, C134S027000, C134S028000, C134S029000, C134S030000, C134S031000, C134S034000, C134S035000, C134S036000, C134S041000, C134S042000

Reexamination Certificate

active

07052553

ABSTRACT:
A non-destructive and simple method for cleaning a new or used electrostatic chuck comprises a wet cleaning process, which removes contaminants deposited on a surface of the electrostatic chuck.

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