Web lift system for chemical mechanical planarization

Abrading – Abrading process – Utilizing nonrigid tool

Reexamination Certificate

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C451S041000, C451S297000, C451S311000

Reexamination Certificate

active

07008303

ABSTRACT:
Generally, a method and system for lifting a web of polishing material is provided. In one embodiment, the system includes a platen that has a first lift member disposed adjacent to a first side and a second lift member disposed adjacent to a second side. The platen is adapted to support the web of polishing media that is disposed between the first and the second lift members. A method includes supporting a web of polishing media on a platen between a first lift member and a second lift member and moving at least the first lift member or the second lift member to an extended position relative the platen that places the web in a spaced-apart relation with the platen.

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Sommer, et al., “Polishing Media Stabilizer”, U.S. Appl. No. 09/258,036, filed Feb. 25, 1999.
Butterfield, et al., “Platen With Web Release Apparatus”, U.S. Appl. No. 09/676,395, filed Sep. 29, 2000.
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White, et al., “Web Lift System for Chemical Mechanical Planarization”, U.S. Appl. No. 09/651,657, filed Aug. 29, 2000.

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