Abrading – Abrading process – Utilizing nonrigid tool
Reexamination Certificate
2006-03-07
2006-03-07
Eley, Timothy V. (Department: 3724)
Abrading
Abrading process
Utilizing nonrigid tool
C451S041000, C451S297000, C451S311000
Reexamination Certificate
active
07008303
ABSTRACT:
Generally, a method and system for lifting a web of polishing material is provided. In one embodiment, the system includes a platen that has a first lift member disposed adjacent to a first side and a second lift member disposed adjacent to a second side. The platen is adapted to support the web of polishing media that is disposed between the first and the second lift members. A method includes supporting a web of polishing media on a platen between a first lift member and a second lift member and moving at least the first lift member or the second lift member to an extended position relative the platen that places the web in a spaced-apart relation with the platen.
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Somekh Sasson
Sommer Phillip R.
White John M.
Applied Materials Inc.
Eley Timothy V.
Patterson & Sheridan
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