Waveguiding epitaxial LiNbO.sub.3 films

Details Waveguiding epitaxial LiNbO.sub.3 films Waveguiding epitaxial LiNbO.sub.3 films

1976-07-21

1978-02-14

Emery, Stephen J.

Adhesive bonding and miscellaneous chemical manufacture

Delaminating processes adapted for specified product

Delaminating in preparation for post processing recycling step

156DIG87, 156619, 423593, 427162, B01J 1724, C01G 3500, C01G 100

Patent

active

040736750

ABSTRACT:
A process is described for making optical circuits on LiTaO.sub.3 substrates. The process involves putting down an epitaxial layer of LiNbO.sub.3 on the LiTaO.sub.3 substrates. Growth is preferably carried out on certain planes of the LiTaO.sub.3. These optical circuits are unique in that they are smooth, uniform in thickness and have a refractive index significantly larger than that of the substrate. This is advantageous in optical circuitry, since the optical modes in the circuits are quite distinct and can be coupled separately using such light sources as lasers and light emitting diodes.

REFERENCES:
miyazawa, Appl. Phys. Lett., vol. 23, No. 4, Aug. 15, 1973, pp. 198-200.
Tien, Appl. Phy. Lett., vol. 24, No. 10, May 15, 1974, pp. 503-506.
Ballman, Journal of Crystal Growth, vol. 30, No. 1, Aug. 1975, pp. 37-41.
Ballman, Journal of Crystal Growth, 29, 1975, pp. 289-295.
Tien, J. of Vacuum Science and Tech., vol. 12, No. 4, Jul.-Aug. 1975, pp. 892-904.

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