Waterborne photoresists having polysiloxanes

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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430906, 430910, 522 85, 522110, G03C 173

Patent

active

053874943

ABSTRACT:
A waterborne photoimageable composition or photoresist comprises a latex binder polymer having sufficient carboxylic acid functionality to render it developable in alkaline aqueous solution, a photopolymerizeable monomer fraction, a photoinitiator chemical system and a poly(siloxane(s)).

REFERENCES:
patent: 5045435 (1991-09-01), Adams et al.
patent: 5268256 (1993-12-01), Goetz et al.

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