Water soluble negative tone photoresist

Details Water soluble negative tone photoresist Water soluble negative tone photoresist

2007-06-26

2007-06-26

Duda, Kathleen (Department: 1756)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S394000

Reexamination Certificate

active

10443359

ABSTRACT:
In accordance with the objectives of the invention a new water soluble negative photoresist is provided for packing-and-unpacking (PAU) processing steps.

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