Water soluble contrast enhancement layer method of forming resis

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device

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430193, 430312, 430325, 430326, 430329, G03F 726

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048163805

ABSTRACT:
A water soluble contrast enhancement compound and composition, and a method of use thereof, are disclosed for improving sidewall profiles in photoresist patterning and developing. The compound consists of a 1-oxy-2-diazonaphthalene sulfonamide salt.

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Halle, L. F., J. Vac. Sci Tech. B., vol. 3, No. 1, 1/2--1985, Paper Accepted 9/1984, pp. 323-326.

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