Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent
1986-06-27
1989-03-28
Bowers, Jr., Charles L.
Radiation imagery chemistry: process, composition, or product th
Imaging affecting physical property of radiation sensitive...
Making electrical device
430193, 430312, 430325, 430326, 430329, G03F 726
Patent
active
048163805
ABSTRACT:
A water soluble contrast enhancement compound and composition, and a method of use thereof, are disclosed for improving sidewall profiles in photoresist patterning and developing. The compound consists of a 1-oxy-2-diazonaphthalene sulfonamide salt.
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Covington John B.
Kim Peter
Marriott Vic B.
Venable Larry G.
Bowers Jr. Charles L.
Braden Stanton C.
Comfort James T.
Sharp Melvin
Texas Instruments Incorporated
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