Refrigeration – Low pressure cold trap process and apparatus
Patent
1997-08-20
1999-05-11
Capossela, Ronald
Refrigeration
Low pressure cold trap process and apparatus
417901, B01D8/00
Patent
active
059015586
ABSTRACT:
A cold trap includes a fluid conduit having a fluid flow path therethrough, a length along the fluid flow path and a width transverse to the fluid flow path. The width of the fluid conduit is greater than the length. A gate valve is formed integrally with the fluid flow conduit for opening and closing the fluid flow path. A cryopumping array having an outer rim surrounding a central opening is positioned within the fluid conduit downstream from the gate valve and transverse to the fluid flow path such that the fluid flow path extends through the central opening. The outer rim captures water vapor from the fluid flow path.
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Mundinger, H.J., et al., "Fast Cryopump Regeneration Does More Than Save Time," Semiconductor International, pp. 154-156 (Jul. 1993).
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Photograph from CTI-Cryogenics Manual.
Drawing from CTI-Cryogenics Manual.
Matte Stephen R.
Weeks Alan L.
Capossela Ronald
Helix Technology Corporation
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