Projection exposure method and apparatus for improved image tran

Details Projection exposure method and apparatus for improved image tran Projection exposure method and apparatus for improved image tran

1994-12-29

1996-01-02

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 55, G03B 2742

Patent

active

054813328

ABSTRACT:
On the pupil plane of the projection optical system, a light shield member, having apertures separated from the optical axis, is provided. Light beams from the apertures illuminate a photomask from oblique directions, and are projected on a photosensitive substrate through a projection optical system. When the photomask bears a periodic pattern and a non-periodic pattern, the oblique illumination provides a larger depth of focus in the projected image of the periodic pattern than in the projected image of the non-periodic pattern. A partial area, in which the non-periodic pattern is projected, of the photosensitive substrate is matched with the best focal plane of the projection optical system, whereby satisfactory image transfer is realized over the entire area of the photomask.

REFERENCES:
patent: 4063812 (1977-12-01), Abraham et al.
patent: 4506977 (1985-03-01), Sato et al.
patent: 4705940 (1987-11-01), Kohno
patent: 4748478 (1988-05-01), Suwa et al.
patent: 4999669 (1991-03-01), Sakamoto et al.
patent: 5045417 (1991-09-01), Okamoto
patent: 5264898 (1993-11-01), Kamon et al.
patent: 5305054 (1994-04-01), Suzuki et al.
patent: 5381210 (1995-01-01), Hagiwara
patent: 5386269 (1995-01-01), Kosugi
patent: 5408083 (1995-04-01), Hirukawa et al.
patent: 5416562 (1995-05-01), Ota et al.
Extended Abstracts (The 52nd Autumn Meeting, 1991); The Japan Society of Applied Physics, pp. 600-603.

Affiliated with

Also associated with

Rating

Projection exposure method and apparatus for improved image tran does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Projection exposure method and apparatus for improved image tran, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Projection exposure method and apparatus for improved image tran will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-239199