Fluid sprinkling – spraying – and diffusing – Slow diffusers – Gravity flow of liquid from supply holder
Patent
1996-01-22
1997-03-11
Wayner, William E.
Fluid sprinkling, spraying, and diffusing
Slow diffusers
Gravity flow of liquid from supply holder
165DIG171, 239 44, 261 70, 392395, A24F 2500, F24F 608
Patent
active
056092962
DESCRIPTION:
BRIEF SUMMARY
TECHNICAL FIELD
The present invention relates to a water feed device for humidification and an air conditioning apparatus incorporating the same. Here, the water feed device for humidification may be designed for use, for example, in a bid-cultivating chamber, a clean room (box), a constant temperature and isohumid box for temperature and humidity control, an air conditioning unit for ultra high precision cutting, a semiconductor wafer manufacturing system and so forth. The water feed device for humidification is used with a humidifier unit for effecting a humidification while vaporizing pure water or ultra pure water and is adapted to feed into the humidifier unit such pure water serving as the humidifying water. The air conditioning apparatus here may be associated with a spin coating system that is designed to coat a regist upon a surface of a semiconductor while rotating the same or to apply a coating material upon a substrate of an optical disk, and which is able to feed a constant temperature and isohumid air stream into any of a variety of operating stations that are included in such systems.
BACKGROUND ART
In case where it is desirable to feed a given amount of water into a reservoir and so forth, it has been customary to use a pump.
In case where water is fed through a pump, there is no difficulty in controlling the rate of flow of the water. This is not the case, however, where the water is pure water or ultra pure water. Then, a pump is not suitable for use in feeding the water.
This is attributed to the fact that pure water unlike normal water does not contain an impurity which serves to provide a lubricating function for a sliding surface contained in a pump and so forth. Thus, if pure water is fed through a unit, such as a customary pump, which involves a mechanical friction, there has been encountered the problem that the pump or the like unit is low in its durability and does cause the pure water to be contaminated due to a wear of a component thereof. Should the pure water be ever fed through the pump or the like, a prohibitively large feed equipment would be required, and its system and operation would be prohibitively costly.
Besides, in this conjunction, while a tube pump is non-contaminative to pure water, it must be taken into account that the same is poor in its durability and in addition is inconvenient in that a pulsation takes place unavoidably.
Furthermore, in case where a unit for feeding water through a pump is used with a humidifier unit in which a heating wire made up from a metal or the like is brought into direct contact with water, the problem is brought about that an electrical leakage may sometimes take place externally via the pure water. Thus, pure water (with its resistance value of 18 ohm) is by no means an insulator and, if carbon dioxide in the air is absorbed therein, it will have its resistance value further reduced to one tenth. Hence, the problem of an electrical leakage tends always to be brought about.
An air conditioning apparatus of the conventional design has been constructed as shown, for example, in Japanese Unexamined Patent Publication No. Hei 02-1113. Thus, it typically comprises a cooling dehumidifier unit for cooling an intake air flow to dehumidify the cooled air flow, a heating unit for heating to a predetermined temperature the air flow that has been dehumidified by the cooling dehumidifier unit, a humidifier unit for humidifying the resulting air flow to a predetermined humidity and an air blower unit for feeding the humidified air flow.
And, in the conventional air conditioning apparatus, the air blower unit, the cooling dehumidifier unit that comprises a heat exchanger for a cooling purpose, the heating unit that comprises a heat exchanger designed to adjust the air temperature, and the humidifier unit are successively arranged in a vertical direction within a cylindrical housing so that a vertical laminar flow of which the temperature and the humidity are controlled may be fed to an area to be air conditioned, such as a spin coating syste
REFERENCES:
patent: 987433 (1911-03-01), Crawford
patent: 4651819 (1987-03-01), Yumikura et al.
patent: 5203505 (1993-04-01), Yum
Hayakashi Bunji
Imaizumi Hisaakira
Imamura Toshihide
Kadotani Kan-ichi
Matsumoto Toshihiko
Komatsu Ltd.
Wayner William E.
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