Water-based photoresists using stilbene compounds as crosslinkin

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making

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20415914, 20415915, 430271, 430281, 430311, 430905, 430909, G03C 168

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active

042999103

ABSTRACT:
Improved aqueous photoresist compositions comprising a water-soluble polymeric material and a photosensitive cross-linking agent, therefore, having the formula: ##STR1## wherein, A and B are independently amino or nitro and M is an alkali metal or ammonium ion, and process of exposing and developing same.

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