Washing apparatus for disc-like workpieces

Details Washing apparatus for disc-like workpieces Washing apparatus for disc-like workpieces

1997-06-12

1998-09-22

Coe, Philip R.

Cleaning and liquid contact with solids

Apparatus

Sequential work treating receptacles or stations with means...

134902, B08B 1102

Patent

active

058100288

ABSTRACT:
Numerous spin-dry mechanisms 45A, 45B, and 45C for drying workpieces W at individual drying positions by rotating them at high speed are disposed in a drying section 3 of a washing apparatus, and sequentially move forward and backward between the respective drying position and the workpiece delivery position 3A at which workpieces are delivered to a transfer mechanism 6.

REFERENCES:
patent: 5177514 (1993-01-01), Ushijima et al.
patent: 5254205 (1993-10-01), Tsutsumi et al.
patent: 5357645 (1994-10-01), Onodera
patent: 5404894 (1995-04-01), Shiraiwa
patent: 5590672 (1997-01-01), Ohmori et al.
Patent Abstracts of Japan, JP3-93040, Apr. 18, 1991.
Patent Abstracts of Japan, JP62-82513, Apr. 16, 1987.

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