Washing apparatus

Details Washing apparatus Washing apparatus

1991-11-21

1993-07-13

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

Having self cleaning means

134140, 134902, B08B 302

Patent

active

052264378

ABSTRACT:
A washing apparatus for performing a batch treatment of a plurality of wafers has a vessel and a wafer boat dedicated to the vessel and movable in the vertical direction. The boat has a fork, which supports the wafers in the vessel in a manner such that the wafers are spaced from one another at predetermined intervals. The wafers are received in a carrier, and are transferred to the boat by a rotary transfer arm. This arm has a fork for supporting the wafers during transfer thereof in a manner such that the wafers are spaced from one another at the predetermined intervals. Transfer of the rotary transfer arm is performed above the washing vessel by moving the boat up and down. At this time, the forks of the boat and arm engage with each other.

REFERENCES:
patent: 1869287 (1932-07-01), Thomas et al.
patent: 3426772 (1969-02-01), Foster
patent: 4471716 (1984-09-01), Milliren
patent: 4722752 (1988-02-01), Steck
patent: 4902350 (1990-02-01), Steck
patent: 4936328 (1990-06-01), Yatake
patent: 4974619 (1990-12-01), Yu

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