Wafer transport robot arm for transporting a semiconductor wafer

Details Wafer transport robot arm for transporting a semiconductor wafer Wafer transport robot arm for transporting a semiconductor wafer

1996-12-23

1998-06-16

Cherry, Johnny D.

Handling: hand and hoist-line implements

Utilizing fluid pressure

Venturi effect

414941, B25J 1506

Patent

active

057658897

ABSTRACT:
An arm structure of a wafer transfer robot for transporting a semiconductor wafer by vacuum absorption, comprising a body, a plurality of fingers extending in parallel from respective ends of a main vacuum line formed in the body, a plurality of branch vacuum lines extending from the main vacuum line through the fingers, respectively, and being in communication with the main vacuum line, a plurality of vacuum-absorbing projections provided with openings in communication with the respective branch vacuum lines, and projected upwardly on each upper surface of the fingers, for holding the wafer by vacuum-absorption, and structures for horizontally supporting the wafer on the arm. With this wafer transfer robot arm, the wafer can be stably transported because vacuum leakage does not occur between the arm and the wafer held by a vacuum absorption.

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