Wafer transport mechanism

Details Wafer transport mechanism Wafer transport mechanism

1986-08-22

1988-03-01

Spar, Robert J.

Material or article handling

Horizontally swinging load support

Swinging about pivot

74479, 414749, 901 21, 901 23, B65H 500

Patent

active

047282525

ABSTRACT:
A workpiece transfer apparatus includes a drive assembly and a transfer arm assembly. The transfer arm assembly is articulated, including a linking arm enclosure pivotally attached to a transfer arm. The linking arm enclosure is mounted on a rotatable sleeve, which in turn is mounted in a bearing assembly which is mountable in a housing. A shaft runs axially through the sleeve and terminates with a pulley within the linking arm enclosure. The transfer arm is coupled to the shaft so that rotation of the sleeve relative to the shaft causes articulation of the transfer arm assembly. A first motor causes rotation of the sleeve and the shaft simultaneously, which effects rotation of the transfer arm relative to the housing. A second motor rotates the sleeve relative to the shaft, causing translation of the transfer arm relative to the housing.

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patent: 4693666 (1987-09-01), Garin
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