Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rack moved vertically by elevating means
Patent
1997-12-23
1999-08-03
Bucci, David A.
Material or article handling
Movable rack having superposed, charge-supporting elements,...
Rack moved vertically by elevating means
414416, 414937, B65G 106
Patent
active
059316276
ABSTRACT:
A wafer transport apparatus comprises a wafer loading shuttle unit 30 and a wafer unloading shuttle unit 40, positioned on both sides of vacuum cassettes 20 provided in batch processing ion implantation equipment. Each shuttle unit has shuttle cassettes 31, 41 having wafer supports corresponding to wafer holding racks. Each shuttle cassette is configured so that movement between a transfer position for transferring wafers to and from the cassette unit and a standby position is possible. The wafer holding racks support the wafers at a central area thereof. The wafer supports support the wafer on both sides along the diameter of the wafer at points away from the central area.
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Patent Abstracts of Japan, vol. 17, No. 160 (E-1342), Mar. 29, 1993, p. 76, JP 4-322444.
Okada Keiji
Taniguchi Katsuhiro
Bucci David A.
Sumitomo Eaton Nova Corporation
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