Wafer transfer system of semiconductor fabricating equipment usi

Details Wafer transfer system of semiconductor fabricating equipment usi Wafer transfer system of semiconductor fabricating equipment usi

1998-01-13

2000-11-14

Werner, Frank E.

Material or article handling

Device for emptying portable receptacle

For emptying contents thereof into portable receiving means

414416, 414274, 41422202, 41422501, 414937, 414941, 901 47, 36447803, 36447814, 36447806, 36447816, 235462, H01L 2102

Patent

active

06146077&

ABSTRACT:
A wafer transfer system of semiconductor fabricating equipment is capable of successively arranging a plurality of wafers in a designated order (e.g., an ascending order, a descending order, an odd/even number order or an individual selection order). The wafer transfer system includes a first cassette containing the wafers, and a second cassette for receiving the wafers. A wafer transfer robot having a wafer transfer arm moves the wafers from the first cassette to the second cassette, after the wafer serial numbers have been read and sent to a computer. The computer uses a selected wafer arrangement order to decide where within the second cassette each wafer from the first cassette should be placed and then controls the wafer transfer robot to place each wafer into the desired location. With the wafers arranged in the selected order, it is not necessary to test each wafer after each fabricating process. Instead, several wafers can be selectively tested at suspected weak points, while changes in the properties of the fabricating processes can still be detected. Testing time is thereby saved, and productivity is improved.

REFERENCES:
patent: 5308222 (1994-05-01), Bacchi et al.
patent: 5975836 (1999-11-01), Rodriguez

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