Wafer transfer system

Details Wafer transfer system Wafer transfer system

2004-10-14

2008-10-21

Keenan, James (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C454S187000

Reexamination Certificate

active

07438514

ABSTRACT:
A wafer transfer system, and method of controlling pressure in the system, includes a loadport for receiving a wafer container, a housing operably connected to the loadport, a wafer transfer mechanism for transferring a wafer between the wafer container and the housing, a wafer container sensor for detecting a presence of the wafer container on the loadport, a variable speed fan disposed in a first portion of the housing, a variable exhaust unit disposed in a second portion of the housing facing the first portion, the variable exhaust unit being capable of varying an exhaust rate of air from the housing, and a controller for variably operating the variable speed fan and the variable exhaust unit in response to a signal from the wafer container sensor.

REFERENCES:
patent: 5549512 (1996-08-01), Sinclair et al.
patent: 6050891 (2000-04-01), Nering
patent: 6224679 (2001-05-01), Sasaki et al.
patent: 6364762 (2002-04-01), Kaveh et al.
patent: 6658917 (2003-12-01), Kim et al.
patent: 2003/0094135 (2003-05-01), Komiya et al.
patent: 07-307372 (1995-11-01), None
patent: 2002-231782 (2002-08-01), None

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