Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent
1984-12-10
1987-01-06
Spar, Robert J.
Material or article handling
Apparatus for moving material between zones having different...
For carrying standarized mechanical interface type
110180, 118724, 118728, 118733, 204298, 414225, 432237, B65G 100, C23C 1400
Patent
active
046343318
ABSTRACT:
Apparatus for programmably orienting a semiconductor wafer in an ion implantation system so as to limit channeling and to control the depth of penetration of impinging ions. The apparatus is associated with a processing chamber door and includes a rotatable vacuum chuck for engaging the wafer and a motor for rotating the vacuum chuck and the wafer through a preselected angular displacement. The apparatus further includes a programmable control assembly operative to deenergize the motor upon sensing rotation of the vacuum chuck through the preselected angular displacement. The wafer orientation apparatus is typically utilized in a system for the vertical transfer of wafers between a cassette and a processing chamber.
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Bucci David A.
Cole Stanley Z.
Herbert L. F.
McClellan W. R.
Spar Robert J.
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