Wafer transfer robot

Details Wafer transfer robot Wafer transfer robot

1997-07-09

1999-11-23

Bucci, David A.

Material or article handling

Device for emptying portable receptacle

Nongravity type

2941031, 294907, 414938, 414941, 901 35, B65G 104

Patent

active

059889713

ABSTRACT:
In one aspect, the present invention provides an apparatus for transferring wafers to or from a wafer cassette having a plurality of wafer-receiving slots, wherein the apparatus comprises a wafer paddle which is adapted to be inserted into a wafer cassette alongside a wafer. Edge grippers carried by the wafer paddle releasible grip the wafer by its edges. A first capacitive sensor carried by the wafer paddle is oriented in a first direction for sensing information about a wafer in a wafer receiving slot of the wafer cassette. A second capacitive sensor carried by the wafer paddle is oriented in a direction perpendicular to the first direction for sensing additional proximity information about a wafer in a wafer receiving slot of the cassette. A transport mechanism produces movement of the wafer paddle along at least three axes of movement to permit transferring wafers to or from respective wafer receiving slots of the wafer cassette. In a more specific aspect, the transport mechanism produces movement along five axes: relative translational movement along orthogonal x, y and z axes, rotational movement about a rotational axis, and tilting movement of the wafer paddle about a paddle tilt axis.

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Water Transfer Robot, Utilizing Capacitve Gage Technology, ADE Optical Systems, May 1996, pp. 1-4.
Guy Mongodin, "Handling Equipment", Semiconductor Production, pp. 31-33, Autumn 1980.

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