Wafer transfer blade

Details Wafer transfer blade Wafer transfer blade

1995-07-11

1998-05-26

Kramer, Dean

Handling: hand and hoist-line implements

Contact lens applicator

294 32, 414941, B25J 1500

Patent

active

057554692

ABSTRACT:
A wafer transfer blade in a wafer transfer arm employed for a semiconductor device manufacturing process, includes a flat region whereon a wafer is loaded; and an end region being integral with the flat region and having a rounded side surface so as to deflect impact on the wafer when colliding with the transfer blade, to thereby reduce wafer edge chipping.

REFERENCES:
patent: 4618178 (1986-10-01), Hutson et al.
patent: 4620738 (1986-11-01), Schwartz et al.
patent: 4778332 (1988-10-01), Byers et al.
patent: 4981315 (1991-01-01), Poli et al.
patent: 5080549 (1992-01-01), Goodwin et al.

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