Wafer transfer apparatus

Details Wafer transfer apparatus Wafer transfer apparatus

1987-07-31

1990-09-18

Bucci, David A.

Material or article handling

Device for emptying portable receptacle

For emptying contents thereof into portable receiving means

206328, 206454, 211 41, 294 871, 414416, 414417, 414751, 414786, B65G 6530

Patent

active

RE0333417

ABSTRACT:
An automated system lifts a batch of semiconductor wafers from a slotted carrier, transfers them laterally and lowers them into a second slotted carrier. In doing this, jaws on the lifting apparatus open automatically to receive or release the wafers. With a carrier having relatively high slotted sides, such as the commonly used plastic cassette, a pusher engages the lower edge of the wafers exposed through the bottom of the cassette and pushes them upwardly sufficiently far to permit the lifter jaws to receive and lift the wafers. The apparatus is oriented at a slight angle to insure that the wafers are all arranged in precise, spaced, parallel relation so as to cooperate with slots in the lifter jaws and slots in the receiving carrier. The system has the capability to move two batches of 25 wafers to a quartz boat having 50 more-closely spaced slots, and similarly, two batches from a quartz boat may be transferred to two different plastic cassettes.

REFERENCES:
patent: 3534862 (1970-10-01), Shambelan
patent: 3678893 (1972-07-01), Bell, III
patent: 3841689 (1974-10-01), Hurlbrink, III
patent: 3998333 (1976-12-01), Kamada
patent: 4023691 (1977-05-01), Perel
patent: 4311427 (1982-01-01), Coad et al.
patent: 4355974 (1982-10-01), Lee
patent: 4436474 (1984-03-01), Brossman, Jr. et al.
patent: 4457661 (1984-07-01), Flint et al.
patent: 4466766 (1984-08-01), Geren et al.
patent: 4603897 (1986-08-01), Foulke et al.

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