Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2007-05-01
2007-05-01
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C438S711000
Reexamination Certificate
active
10927500
ABSTRACT:
The invention relates to controlling a semiconductor processing system. Among other things, the invention relates to a run-to-run controller to create virtual modules to control a multi-pass process performed by a multi-chamber tool during the processing of a semiconductor wafer.
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Funk Merritt
Natzle Wesley
International Business Machines - Corporation
Picard Leo
Pillsbury Winthrop Shaw & Pittman LLP
Rao Sheela S.
Tokyo Electron Limited
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