Wafer-to-wafer control using virtual modules

Details Wafer-to-wafer control using virtual modules Wafer-to-wafer control using virtual modules

2007-05-01

2007-05-01

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C438S711000

Reexamination Certificate

active

10927500

ABSTRACT:
The invention relates to controlling a semiconductor processing system. Among other things, the invention relates to a run-to-run controller to create virtual modules to control a multi-pass process performed by a multi-chamber tool during the processing of a semiconductor wafer.

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patent: 2005/0090927 (2005-04-01), Tanaka et al.
patent: WO 2004/019147 (2004-03-01), None

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