Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate
2005-08-09
2005-08-09
Loke, Steven (Department: 2811)
Active solid-state devices (e.g., transistors, solid-state diode
Test or calibration structure
C257S627000
Reexamination Certificate
active
06927416
ABSTRACT:
A wafer support plate comprises a support surface on which a semiconductor wafer is supported, and a crystal orientation mark which indicates the crystal orientation of the semiconductor wafer. Even the semiconductor wafer thinned by grinding can be stably held on the support surface, and the crystal orientation can be recognized even when the outer periphery of the semiconductor wafer has chipped.
REFERENCES:
patent: 2003/0094674 (2003-05-01), Ipposhi et al.
patent: 7-014912 (1995-01-01), None
patent: 2001-267193 (2001-09-01), None
“Semiconductor devices-Physics and technology” by Sze, 1985, pp. 328-329.
Arai Kazuhisa
Kitamura Masahiko
Namioka Shinichi
Nanjo Masatoshi
Yajima Koichi
Disco Corporation
Loke Steven
Wenderoth , Lind & Ponack, L.L.P.
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