Wafer sensing apparatus for sensing wafer insertion

Details Wafer sensing apparatus for sensing wafer insertion Wafer sensing apparatus for sensing wafer insertion

1996-12-20

1999-04-06

Evans, F. L.

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

250214B, 414937, G01N 2184

Patent

active

058922407

ABSTRACT:
A wafer sensing apparatus for sensing whether a wafer is inserted in a wafer cassette. The wafer sensing apparatus includes a light emitting device for emitting light of a predetermined wavelength toward the inside of a wafer cassette, a light sensing device, positioned opposite to the light emitting device, for sensing the emitted light, and an optical filter device for passing light corresponding only to the predetermined wavelength of light emitted from the light emitting device. The light sensing device is not affected by interference light from outside sources that can cause a faulty wafer sensing function, since the interfering light is reflected or absorbed by the optical filter device. Equipment malfunctions caused by faulty sensing from the light sensing device are prevented, thereby improving the equipment operating efficiency.

REFERENCES:
patent: 4093384 (1978-06-01), Ferguson
patent: 5225691 (1993-07-01), Powers et al.

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