Wafer scale production of optical elements

Details Wafer scale production of optical elements Wafer scale production of optical elements

2005-05-24

2005-05-24

Pyon, Harold (Department: 1772)

Stock material or miscellaneous articles

Structurally defined web or sheet

Including variation in thickness

C359S578000, C359S577000, C359S260000

Reexamination Certificate

active

06896949

ABSTRACT:
Improved optical element wafers comprising stacked, optically coupled etalon wafers are disclosed. Each etalon wafer comprises a bulk optic wafer defining the optic cavity between selectively transparent thin film mirror coatings. The bulk optic wafer comprises an optically transparent body, such as a portion of a substrate wafer, along with a wedge correcting coating on at least one of the two surfaces of the optically transparent body and/or a thickness-adjustment layer on one or both surfaces. The bulk optic wafer is a solid, self-supporting body, optically transparent (at the wavelength or wavelengths of interest), whose thickness, i.e., the dimension between the selectively transparent surfaces, defines the cavity spacing of the bulk optic etalon wafer. Methods of making and using the optical element wafers are also disclosed.

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