Wafer processing apparatus with wafer alignment device

Details Wafer processing apparatus with wafer alignment device Wafer processing apparatus with wafer alignment device

2011-06-21

2011-06-21

Lowe, Michael S (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S935000, C414S936000

Reexamination Certificate

active

07963736

ABSTRACT:
A semiconductor-processing apparatus includes: a wafer handling chamber; a wafer processing chamber; a wafer handling device; a first photosensor disposed in the wafer handling chamber in front of the wafer processing chamber at a position where the wafer partially blocks light received by the first photosensor at a ready-to-load position and substantially entirely blocks light received by the first photosensor when the wafer moves from the ready-to-load position toward the wafer processing chamber in the x-axis direction; and a second photosensor disposed in the wafer handling chamber in front of the wafer processing chamber at a position where the wafer does not block light received by the second photosensor at the ready-to-load position and partially blocks light received by the second photosensor when the wafer moves from the ready-to-load position toward the wafer processing chamber in the x-axis direction.

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