4. Material or article handling
  5. Horizontally swinging load support
  6. Swinging about pivot

Masaei Suwada

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Gas-line system for semiconductor-manufacturing apparatus

Fluid handling – Processes – With control of flow by a condition or characteristic of a...
Reexamination Certificate

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Position sensor system for substrate transfer robot

Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
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Semiconductor manufacturing equipment and maintenance method

Material or article handling – Associated with semiconductor wafer handling
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Semiconductor processing apparatus comprising chamber...

Material or article handling – Apparatus for moving material between zones having different...
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Semiconductor processing apparatus comprising chamber...

Material or article handling – Apparatus for moving material between zones having different...
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Profile ID: LFUS-PAI-P-2122894

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