Wafer positioning system

Boots – shoes – and leggings

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

36416701, 901 47, 414935, 318640, G05B 1101

Patent

active

055637981

ABSTRACT:
A wafer positioning system determines the position of a wafer during processing by monitoring the position of the wafer transport robot as the robot transports the wafer by one or more position sensors. The wafer positioning system incorporates a transparent cover on the surface of the wafer handling chamber and two optical position sensors disposed on the surface of the transparent cover. The position sensors direct light through the wafer handling chamber to reflectors near the floor of the chamber which reflect the light back to the position sensors. A detector within the position sensor detects when the beam path from the position sensor to the reflector is uninterrupted. As wafers are transported through the chamber, the edge of the transported wafer interrupts the position sensor beam path causing the output of the position sensor to switch states. When the position sensor output switches, the position of the wafer transport robot is measured. At least two data points are measured to establish the wafer position. If the wafer is not at its nominal position, the position of the wafer transport robot is adjusted to compensate for the wafer misalignment.

REFERENCES:
patent: 4697089 (1987-09-01), Drage
patent: 4770590 (1988-09-01), Hugues et al.
patent: 4819167 (1989-04-01), Cheng et al.
patent: 4836733 (1989-06-01), Hertel et al.
patent: 5054991 (1991-10-01), Kato
patent: 5194743 (1993-03-01), Aoyama et al.
patent: 5483138 (1996-01-01), Shmookler et al.
U.S. patent application Serial No. 07/975,197, "System and Method for Automated Positioning of a Substrate in a Processing Chamber," Simon Shmookler, Andrew Weinberg and Martin McGrath, inventors filed on Nov. 12, 1992.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Wafer positioning system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Wafer positioning system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Wafer positioning system will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-61990

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.