Wafer pickup system

Handling: hand and hoist-line implements – Grapple – Multiple grapples for multiple objects

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Details

294 11, 414937, B65G 4907

Patent

active

056476264

ABSTRACT:
A non-vacuum semiconductor pick-up and transfer apparatus for handling semiconductor wafers. A flat tapered blade, with front and rear arcuate abutment surfaces adapted to hold a wafer, is provided. In use the blade is thrust between spaced wafers supported in a holder, lifted to retain the wafer between the abutment surfaces, and removed from the holder. The thin and tapered blade shape minimizes damage to the associated wafers in the event of a misalignment of the blade with the wafers.

REFERENCES:
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patent: 4620738 (1986-11-01), Schwartz et al.
patent: 4744709 (1988-05-01), Hertel et al.
patent: 4867631 (1989-09-01), Warenback et al.
patent: 5195729 (1993-03-01), Thomas et al.
patent: 5380137 (1995-01-01), Wada
patent: 5556147 (1996-09-01), Somekh

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