Wafer loading apparatus

Details Wafer loading apparatus Wafer loading apparatus

1981-12-07

1984-07-03

Paperner, Leslie J.

Material or article handling

Device for emptying portable receptacle

For emptying contents thereof into portable receiving means

414417, 414752, 118729, B65G 6500

Patent

active

044576617

ABSTRACT:
Apparatus for transferring wafers between storage magazines and processing trays. The trays are mounted on a generally cylindrical carousel which is rotated about its axis to bring successive ones of the trays into position for loading wafers on to the trays and unloading wafers from the trays. An elevator assembly is mounted within the carousel and is moveable in an axial direction for alignment with different wafer holding positions which are spaced along the trays. The storage magazines are mounted on the elevator assembly, and wafer transfer blades transfer the wafers between the magazines and radially moveable chucks which carry the wafers to and from the wafer holding positions in the trays.

REFERENCES:
patent: 1377027 (1921-05-01), Pettit
patent: 2501391 (1950-03-01), Karp
patent: 3554391 (1971-01-01), Goodell
patent: 3719166 (1973-12-01), Gereth
patent: 3865072 (1975-02-01), Kirkman
patent: 4009785 (1977-03-01), Trayes
patent: 4306731 (1981-12-01), Shaw
patent: 4311427 (1982-01-01), Coad et al.
patent: 4344383 (1982-08-01), Salt, Jr.
Kehagiouglou, IBM Technical Disclosure Bulletin: Wafer Transfer Systems, Apr. 1976, vol. 18, No. 11, pp. 3696-3697.

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