Wafer-level testing of optical and optoelectronic chips

Details Wafer-level testing of optical and optoelectronic chips Wafer-level testing of optical and optoelectronic chips

2007-02-27

2007-02-27

Patel, Paresh (Department: 2829)

Optical waveguides

With optical coupler

Input/output coupler

C324S754120

Reexamination Certificate

active

10820631

ABSTRACT:
This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical testing by coupling probe light from top of the wafer.

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