Wafer-level packaging of optoelectronic devices

Semiconductor device manufacturing: process – Packaging or treatment of packaged semiconductor

Reexamination Certificate

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Details

C438S022000, C438S051000, C438S064000, C438S025000, C257SE21499, C257SE31117, C257SE31127

Reexamination Certificate

active

07422929

ABSTRACT:
In an embodiment, the invention provides a method for forming a wafer-level package. A bonding pad is formed on a first wafer. After forming the bonding pad, an optoelectronic device is located on the first wafer. A gasket is formed on a second wafer. After a gasket is formed on a second wafer, the second wafer is attached to the first wafer with a bond between the gasket and the bonding pad.

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