Wafer installing cassette for semiconductor manufacturing appara

Details Wafer installing cassette for semiconductor manufacturing appara Wafer installing cassette for semiconductor manufacturing appara

1994-12-02

1996-11-26

Chin-Shue, Alvin C.

Supports: racks

Special article

Platelike

A47F 700

Patent

active

055776213

ABSTRACT:
A wafer installing cassette for semiconductor manufacturing apparatus is disclosed, in which various sizes of wafer can be installed within a certain range. In the present invention, the wafer installing cassette includes two or more shelves each having a plurality of annular steps, and a shelf securing means for supporting the shelves, so that a plurality of wafers of different sizes can be loaded.

REFERENCES:
patent: 3534862 (1970-10-01), Shambelan
patent: 5054418 (1991-10-01), Thompson et al.
patent: 5154299 (1992-10-01), Hwang
patent: 5219079 (1993-06-01), Nakamura

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