4. Supports: racks
  5. Special article
  6. Platelike

Kyoung-Soo Yi

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Chemical deposition reactor and method of forming a thin...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method of forming a thin film

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
Reexamination Certificate

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Wafer installing cassette for semiconductor manufacturing appara

Supports: racks – Special article – Platelike
Patent

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Profile ID: LFUS-PAI-P-1771219

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