Wafer holder and wafer conveyor system equipped with the same

Details Wafer holder and wafer conveyor system equipped with the same Wafer holder and wafer conveyor system equipped with the same

2007-05-22

2007-05-22

Morgan, Eileen P. (Department: 3723)

Abrading

Work feeder

Endless

C451S397000, C451S402000, C451S451000, C198S867140

Reexamination Certificate

active

11016247

ABSTRACT:
The present invention is directed to a wafer holder and a related wafer conveyor system. The wafer holder holds a wafer and moves horizontally within a chamber. A contact area between the wafer and the wafer holder is reduced, and potential contaminants generated by ear between components of the wafer holder are trapped by an airtight cover. Since the wafer holder moves horizontally while being fixed to a guide rail, the wafer conveyor system reduces friction between the guide rail and the wafer holder.

REFERENCES:
patent: 4457419 (1984-07-01), Ogami et al.
patent: 6527630 (2003-03-01), Mannsperger et al.
patent: 6688349 (2004-02-01), Roshilavati Razlan et al.
patent: 2004/0147209 (2004-07-01), Bickford et al.
patent: 2005/0227595 (2005-10-01), Marquardt et al.
patent: 2006/0199478 (2006-09-01), Isobe et al.
patent: 000020758 (2000-04-01), None
patent: 2001-0088425 (2001-09-01), None

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