Wafer holder and sample producing apparatus using it

Details Wafer holder and sample producing apparatus using it Wafer holder and sample producing apparatus using it

2007-02-28

2009-08-11

Berman, Jack I (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Analyte supports

C250S440110, C250S306000, C250S307000, C250S309000, C250S310000, C250S311000, C250S492100, C250S492200, C250S492210

Reexamination Certificate

active

07573047

ABSTRACT:
A wafer holder includes: a frame-shaped holder main body which has an opening at its center and carries a wafer on its upper surface; guide members which contact the outer periphery of the wafer placed on the holder main body and position the wafer on the holder main body; and cross section sample holding members which are disposed on an outer circumference of the holder main body and holds a cross section sample produced from the wafer. Each of the cross section sample holding members includes plate-shaped sample stands to which the cross section sample is fixed, and fixing stands each of which is detachably attached to the holder main body and pinches the sample stand such that the sample stand is attachable to and detachable from the fixing stand.

REFERENCES:
patent: 2006/0163497 (2006-07-01), Kodama et al.
patent: 2007/0145300 (2007-06-01), Tomimatsu et al.
patent: 2007/0272854 (2007-11-01), Agorio et al.
patent: 2002-365182 (2002-12-01), None

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